氬氣技術(shù)指標(biāo):
組分/雜質(zhì) |
液氬/5.0N |
純氬/4.0N |
高純氬/5.0N |
超純氬/6.0N |
氬氣含量 |
99.999% |
99.99% |
99.999% |
99.9999% |
氖Ne |
- |
- |
- |
- |
氫H2 |
≤0.5ppm |
≤5ppm |
≤0.5ppm |
≤0.1ppm |
氧O2 |
≤1.5ppm |
≤10ppm |
≤1.5ppm |
≤0.2ppm |
氮N2 |
≤4ppm |
≤50ppm |
≤4ppm |
≤0.5ppm |
一氧化碳CO |
≤0.3ppm |
≤5ppm |
≤0.3ppm |
≤0.1ppm |
二氧化碳CO2 |
≤0.3ppm |
≤10ppm |
≤0.3ppm |
≤0.1ppm |
總碳(甲烷)THC |
≤0.4ppm |
≤5ppm |
≤0.4ppm |
≤0.1ppm |
水分H2O |
≤3ppm |
≤15ppm |
≤3ppm |
≤0.2ppm |
氬氣包裝種類
鋼瓶種類 |
氣體壓力 |
氣體體積 |
氣體凈重 |
50L鋼瓶? |
19.5±0.5MPa? |
10000L |
15.9kg |
40L鋼瓶? |
13.5MPa |
5400L |
8.6kg? |
杜瓦罐? |
0.8MPa |
130~151Nm3 |
214~250kg |
槽車? |
0.8MPa |
/ |
20噸以上 |
鋼瓶接口:QF-2、PX-32外螺紋/內(nèi)螺紋,螺紋出口G5/8(外徑22.911,牙數(shù)為14牙/英寸,螺距為1.814毫米,牙高1.162,小徑20.587),CGA580 |